Fluid-cooled dielectric window for a plasma system

Details Fluid-cooled dielectric window for a plasma system Fluid-cooled dielectric window for a plasma system

1995-02-16

1996-10-22

Lee, Benny T.

Electric lamp and discharge devices: systems

Combined load device or load device temperature modifying...

Distributed parameter resonator-type magnetron

31511121, 333252, 333 99PL, H01P 108, H05H 134

Patent

active

055680151

ABSTRACT:
A fluid-cooled dielectric window for a microwave plasma system which uses microwave absorbing fluids is described. The window includes a dielectric window and a cooling member in contact with an outer surface of the window which defines a channel and a medium adjacent to the channel. The channel transports a microwave absorbing cooling fluid over the outer surface of the window. The medium allows an electric field to enter through the window and sustain a plasma in a chamber while the fluid is flowing through the channel.

REFERENCES:
patent: 2990526 (1961-06-01), Shelton, Jr.
patent: 3439296 (1969-04-01), Buckley
patent: 5008593 (1991-04-01), Schlie et al.
patent: 5051715 (1991-09-01), Agosti et al.
patent: 5126635 (1992-06-01), Doehler et al.
patent: 5235251 (1993-08-01), Schlie
patent: 5313179 (1994-05-01), Moeller

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