4. Semiconductor device manufacturing: process
  5. Introduction of conductivity modifying dopant into...
  6. Plasma

Matthew D. Scotney-Castle

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Plasma immersion ion implantation process with chamber...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – On insulating substrate or layer
Reexamination Certificate

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Plasma immersion ion implantation process with chamber...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
Reexamination Certificate

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Removal of surface dopants from a substrate

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2301407

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