4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Optical characteristic sensed

Matthew A. Purdy

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Controlling cumulative wafer effects

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Determination of a process flow based upon fault detection...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Dynamic metrology sampling methods, and system for...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
Reexamination Certificate

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Fault detection spanning multiple processes

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Matching data related to multiple metrology tools

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2598239

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