Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-06-27
2006-06-27
Gandhi, Jayprakash N. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S105000, C700S108000, C700S109000, C700S110000, C438S005000, C438S014000, C438S714000
Reexamination Certificate
active
07069103
ABSTRACT:
A method and apparatus provided for controlling cumulative wafer effects. The method comprises processing a workpiece, determining a cumulative effect of the processing on the workpiece and comparing the determined cumulative effect to a reference target value. The method further comprises adjusting a downstream process of the workpiece based on comparing the determined cumulative effect to the reference target value.
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Bode Christopher A.
Purdy Matthew A.
Advanced Micro Devices , Inc.
Gandhi Jayprakash N.
Kasenge Charles
Williams Morgan & Amerson P.C.
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