4. Electric lamp and discharge devices
  5. With gas or vapor
  6. Three or more electrode discharge device

Masayuki Shiraishi

Inventor

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EUV light source, EUV exposure system, and production method...

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Exposure apparatus

Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate

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Form-error-cancelling mirror-support devices and related...

Optical: systems and elements – Mirror – Including specified control or retention of the shape of a...
Reexamination Certificate

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Multi-layered mirror

Optical: systems and elements – Light interference – Produced by coating or lamina
Reexamination Certificate

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Multi-layered mirror

Optical: systems and elements – Light interference – Produced by coating or lamina
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1324451

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