Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2006-07-03
2010-10-12
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S055000, C355S067000, C355S069000
Reexamination Certificate
active
07812928
ABSTRACT:
An exposure apparatus that exposes an object to be exposed with light from an EUV light source. The light has an exposure wavelength component and a non-exposure wavelength component. The exposure apparatus has a detector that independently detects the quantity of light of the exposure wavelength component and the quantity of light of the non-exposure wavelength component of the light. Therefore, for example, even if the quantity of light of the exposure wavelength component and the quantity of light of the non-exposure wavelength component individually fluctuate, it is possible to accurately ascertain fluctuations in the characteristics of the optical system resulting from irradiation heat. As a result, it is also possible to achieve a high performance mirror adjustment system.
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Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Nguyen Hung Henry
Nikon Corporation
Whitesell-Gordon Steven H
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