Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2005-06-22
2009-02-17
Wells, Nikita (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S365000, C250S372000, C315S111210
Reexamination Certificate
active
07491955
ABSTRACT:
An Sn—Ga type alloy having a composition in which the atomic % of Sn is 15% or less is accommodated inside a heated tank4.The Sn alloy pressurized by the pressurizing pump is conducted to a nozzle1,so that a liquid-form Sn alloy is caused to jet from the tip end of this nozzle1disposed inside a vacuum chamber7.The liquid-form Sn alloy that is caused to jet from the nozzle1has a spherical shape as a result of surface tension, and forms a target2.Laser light generated by an Nd:YAG laser light source8disposed on the outside of the vacuum chamber7is focused by a lens9and introduced into the vacuum chamber7.The target2that is irradiated by the laser is converted into a plasma, and radiates light that includes EUV light.
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Finnegan Henderson Farabow Garrett & Dunner LLP
Nikon Corporation
Wells Nikita
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