4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Masatoshi Tokushima

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Apparatus for making exhaust gas non-toxic

Gas separation: apparatus – Magnetic separating means – Electromagnet
Reexamination Certificate

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Metal-semiconductor junction fet

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Junction field effect transistor
Patent

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Method for forming electrodes on mesa structures of a semiconduc

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Method of dry etching and apparatus for making exhaust gas non-t

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Method of exposing a lattice pattern onto a photo-resist film

Radiation imagery chemistry: process – composition – or product th – Plural exposure steps
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1132181

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