4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Product assembly or manufacturing

Masashi Sugishita

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Substrate processing equipment

Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate

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Substrate processing method and semiconductor manufacturing...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Temperature regulating method, thermal processing system and...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Temperature regulating method, thermal processing system and...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2305796

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