Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2008-01-23
2010-06-01
Nhu, David (Department: 2895)
Semiconductor device manufacturing: process
With measuring or testing
C438S680000, C438S905000, C257SE21170, C257SE21320, C257SE21054, C257SE21082, C257SE21267, C257SE21274, C257SE21311, C257SE21521
Reexamination Certificate
active
07727780
ABSTRACT:
A semiconductor manufacturing apparatus and substrate processing method includes a step of acquiring a measurement value based on a first detecting and a second detecting section and determining a first difference of measurement values between the first detecting section and the second detecting section, comparing between a previously stored second difference between measurement values concerning the first detecting section and the second detecting section, calculating a correction value for a pressure in a cooling-gas passage provided between a process chamber and a heating device depending upon the first difference when the first difference is different from the second difference, and correcting the pressure value based on the pressure correction value, and a step of processing the substrate by flowing a cooling gas through the cooling-gas passage while heating the process chamber, and placing the heating device and the cooling device under a control section depending upon a pressure value corrected.
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Hayashida Akira
Sugishita Masashi
Ueno Masaaki
Hitachi Kokusai Electric Inc.
Nhu David
Oliff & Berridg,e PLC
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