Temperature regulating method, thermal processing system and...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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C700S121000, C700S209000, C700S274000, C438S225000, C438S362000, C438S297000, C432S049000, C432S128000, C219S411000, C219S494000, C219S497000

Reexamination Certificate

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07577493

ABSTRACT:
A temperature regulating method in a thermal processing system includes controlling a heating means by performing integral operation, differential operation and proportional operation by means of a heating control section in a manner a detection temperature by a temperature detecting means becomes a predetermined target temperature, determining a first output control pattern by patterning a first operation amount for the heating control section to control the heating means depending upon a detection temperature detected by a first temperature detecting means, in controlling the heating means controlling the heating means by means of the heating control section depending upon the first output control pattern determined, and determining a second output control pattern by patterning at least a part of a second operation amount for the heating control section to control the heating means depending upon a detection temperature detected by a second temperature detecting means, in controlling the heating means.

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patent: 2004-193219 (2004-07-01), None

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