4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Masaki Hosoda

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Charged particle beam exposure apparatus, charged particle...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Electron beam writing system and electron beam writing method

Radiant energy – Means to align or position an object relative to a source or...
Reexamination Certificate

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Electron beam writing system and electron beam writing method

Radiant energy – Means to align or position an object relative to a source or...
Reexamination Certificate

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Exposure apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Mechanism for sealing

Joints and connections – Articulated members – Pivoted
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Profile ID: LFUS-PAI-P-2362441

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