Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2007-02-06
2007-02-06
Wells, Nikita (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S492200, C250S492300, C250S492230, C250S3960ML
Reexamination Certificate
active
11159356
ABSTRACT:
A charged particle beam exposure apparatus for writing a desired pattern on a substrate using a charged particle beam. The apparatus includes a blanking unit, having a deflector capable of deflecting the charged particle beam in at least two directions, configured to control beam passage to the substrate by deflecting the charged particle beam, and a setting unit configured to set a deflection direction of the charged particle beam by the deflector.
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Hosoda Masaki
Kamimura Osamu
Muraki Masato
Fitzpatrick ,Cella, Harper & Scinto
Hitachi High-Technologies Corporation
Souw Bernard
Wells Nikita
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