4. Electricity: measuring and testing
  5. Using ionization effects
  6. For analysis of gas, vapor, or particles of matter

Masaki Hirayama

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Apparatus for plasma process

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
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Device and control method for micro wave plasma processing

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Device and method for plasma processing, and slow-wave plate

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Dielectric film and method of forming it, semiconductor...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Excimer laser oscillation apparatus and method, excimer...

Coherent light generators – Particular active media – Gas
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Profile ID: LFUS-PAI-P-376691

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