4. Radiant energy
  5. Photocells; circuits and apparatus
  6. Photocell controls its own optical systems

Masahiko Okumura

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Exposure apparatus and stage device, and device...

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Interferometric position-measuring devices and methods

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Method and apparatus for aligning a mask and a set of substrates

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent

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Method and apparatus for positioning substrate

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate

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Method and apparatus for positioning substrate and the like

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate

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Profile ID: LFUS-PAI-P-92065

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