Interferometric position-measuring devices and methods

Details Interferometric position-measuring devices and methods Interferometric position-measuring devices and methods

2011-01-25

2011-01-25

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07876452

ABSTRACT:
Process tools and methods are disclosed that involve interferometric and other measurements of movements and positions relative to a process position, such as movements and positions of a stage relative to a lithographic optical system. An exemplary apparatus includes a stage that places a workpiece relative to the tool, and that is movable in at least one direction relative to the tool. At least one first interferometer system is situated relative to the stage to determine stage position in a movement direction relative to the process position. A movement-measuring device determines displacement of the tool from the process position. Using data from the interferometer system and movement-measuring device a processor determines a position of the stage relative to the tool. The processor also corrects the determined position for displacement of the tool.

REFERENCES:
patent: 4814625 (1989-03-01), Yabu
patent: 5141318 (1992-08-01), Miyazaki et al.
patent: 5552888 (1996-09-01), Sogard et al.
patent: 5708505 (1998-01-01), Sogard et al.
patent: 5801832 (1998-09-01), Van Den Brink
patent: 5870197 (1999-02-01), Sogard et al.
patent: 6160628 (2000-12-01), Inoue
patent: 6211965 (2001-04-01), Tsuchiya et al.
patent: 6498352 (2002-12-01), Nishi
patent: 7336369 (2008-02-01), Eckes et al.
U.S. Appl. No. 60/856,630, filed Nov. 3, 2006, Sogard, et al.

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