4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Mark H. Wilcoxson

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Antenna for producing uniform process rates

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Method and apparatus for producing uniform process rates

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Method for plasma stripping using periodic modulation of gas...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for producing a semiconductor device

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Plasma in-situ treatment of chemically amplified resist

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Profile ID: LFUS-PAI-P-2458567

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