4. Abrading
  5. Abrading process
  6. Utilizing fluent abradant

Mark F. Buehler

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Abrasive with a modified surface and a method for making it

Abrasive tool making process – material – or composition – With inorganic material – Clay – silica – or silicate
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Method for defect reduction

Abrading – Abrading process – Utilizing fluent abradant
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Method for defect reduction

Abrading – Abrading process – Utilizing fluent abradant
Reexamination Certificate

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Method for post-CMP conversion of a hydrophobic surface of a...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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