4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Mark A. Bossler

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Modified facet etch to prevent blown gate oxide and increase...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Modified facet etch to prevent blown gate oxide and increase...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Structure and method for forming a faceted opening and a...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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