4. Radiant energy
  5. Radiant energy generation and sources
  6. Plural radiation sources

Marco Jan-Jaco Wieland

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Charged particle beamlet exposure system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Electron beam exposure system

Radiant energy – Radiant energy generation and sources – Plural radiation sources
Reexamination Certificate

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Electron beam exposure system

Radiant energy – Radiant energy generation and sources – Plural radiation sources
Reexamination Certificate

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Lithography system and projection method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Modulator circuitry

Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2852525

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