Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements
Reexamination Certificate
2006-03-28
2006-03-28
Mack, Ricky L. (Department: 2873)
Optical: systems and elements
Single channel simultaneously to or from plural channels
By surface composed of lenticular elements
C359S618000, C359S291000
Reexamination Certificate
active
07019908
ABSTRACT:
The invention relates to a modulator for modulating the magnitude of a beamlet in a multi-beamlet lithography system, said modulator comprising at least one means for influencing the direction of a beamlet, a light sensitive element for receiving light from a modulated light beam and converting said light into a signal, and discretizing means, coupling to said light sensitive element and to at least one of means for influencing, for converting said signal received from said light sensitive element into a discrete signal having discrete values selected from a set of predefined discrete values and providing said discrete signal to said means for influencing.
REFERENCES:
patent: 5521748 (1996-05-01), Sarraf
patent: 6312134 (2001-11-01), Jain et al.
patent: 6870554 (2005-03-01), Jain
patent: 2003/0081303 (2003-05-01), Sandstrom
patent: WO 03/040829 (2003-05-01), None
Habekotte Ernst
Spijker Johannes Christiaan van 't
van der Wilt Floris Pepijn
Wieland Marco Jan-Jaco
Blakely & Sokoloff, Taylor & Zafman
Hasan M.
Mack Ricky L.
Mapper Lithography IP B.V.
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