Radiant energy – Radiant energy generation and sources – Plural radiation sources
Reexamination Certificate
2005-05-24
2005-05-24
Wells, Nikita (Department: 2881)
Radiant energy
Radiant energy generation and sources
Plural radiation sources
C250S492220, C250S492300, C250S306000, C250S398000, C250S3960ML
Reexamination Certificate
active
06897458
ABSTRACT:
The invention relates to an electron beam exposure apparatus for transferring a pattern onto the surface of a target, comprising:a beamlet generator for generating a plurality of electron beamlets;a modulation array for receiving said plurality of electron beamlets, comprising a plurality of modulators for modulating the intensity of an electron beamlet;a controller, connected to the modulation array for individually controlling the modulators,an adjustor, operationally connected to each modulator, for individually adjusting the control signal of each modulator;a focusing electron optimal system comprising an array of electrostatic lenses wherein each lens focuses a corresponding individual beamlet, which is transmitted by said modulation array, to a cross section smaller than 300 nm, anda target holder for holding a target with its exposure surface onto which the pattern is to be transferred in the first focal plane of the focusing electron optical system.
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Kampherbeek Bert Jan
Kruit Pieter
van Veen Alexander Hendrik Vincent
Wieland Marco Jan-Jaco
Blakely & Sokoloff, Taylor & Zafman
Mapper Lithography IP B.V.
Wells Nikita
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