4. Optics: measuring and testing
  5. Angle measuring or angular axial alignment
  6. With photodetection remote from measured angle

Manuel Madriaga

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Apparatus for auto focusing a workpiece using two or more...

Data processing: measuring – calibrating – or testing – Measurement system – Orientation or position
Reexamination Certificate

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Apparatus for designing an optical metrology system...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
Reexamination Certificate

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Automated process control of a fabrication tool using a...

Data processing: measuring – calibrating – or testing – Measurement system – Remote supervisory monitoring
Reexamination Certificate

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Automated process control using optical metrology and a...

Optics: measuring and testing – Dimension
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Automated process control using optical metrology with a...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Profile ID: LFUS-PAI-P-2349864

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