Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
Inventor
active
Electrically insulating sealing structure and its method of use
Electrically insulating sealing structure and its method of...
Integrated sputtering target assembly
Integrated sputtering target assembly
Magnetron sputtering apparatus with an integral cooling and...
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Profile ID: LFUS-PAI-P-301021