4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Manuel A. Quevedo-Lopez

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Method for removing contaminants on a substrate

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Methods and systems to mitigate etch stop clipping for...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Top surface roughness reduction of high-k dielectric...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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