Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
Inventor
active
Doped WGe to form dual metal gates
Formation of fully silicided gate with oxide barrier on the...
Lanthanide series metal implant to control work function of...
Method to eliminate re-crystallization border defects...
Work function adjustment with the implant of lanthanides
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Profile ID: LFUS-PAI-P-3185184