4. Photocopying
  5. Projection printing and copying cameras
  6. Step and repeat

Mandeep Singh

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Capping layer for EUV optical elements

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Capping layer for EUV optical elements

Photocopying – Projection printing and copying cameras – Step and repeat
Reissue Patent

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Illumination system, lithographic apparatus, mirror, method...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Lithographic apparatus, device manufacturing methods,...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Lithographic apparatus, device manufacturing methods,...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2193790

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