Capping layer for EUV optical elements

Details Capping layer for EUV optical elements Capping layer for EUV optical elements

2011-05-10

2011-05-10

Nguyen, Hung Henry (Department: 2882)

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Projection printing and copying cameras

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C355S030000, C355S067000

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active

RE042338

ABSTRACT:
Optical elements such as multilayered EUV mirrors are provided with protective capping layers of diamond-like carbon (C),delete-start id="REI-00001" date="20110510" ?boron nitride (BN), boron carbide (B4C), silicon nitride (Si3N4), silicon carbide (SiC), B, Pd, Ru, Rh, Au,delete-end id="REI-00001" ?MgF2, LiF, C2F4delete-start id="REI-00002" date="20110510" ?and TiNdelete-end id="REI-00002" ?and compounds and alloys thereof. The final period of a multilayer coating may also be modified to provide improved protective characteristics.

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