4. Coating apparatus
  5. Gas or vapor deposition
  6. Having means to expose a portion of a substrate to coating...

Mamoru Satou

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Apparatus for thin film formation

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Patent

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Method for thin film formation

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
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Process for production of high-hardness boron nitride film

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
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Profile ID: LFUS-PAI-P-669101

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