4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Madhusudan Mukhopadhyay

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CMP uniformity

Abrading – Machine – Rotary tool
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Method for forming dual gate oxide

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method of fabricating an antifuse element

Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to conductive state
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Method of forming salicided poly to metal capacitor

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
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Method of forming top metal contact to antifuse

Semiconductor device manufacturing: process – Chemical etching
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Profile ID: LFUS-PAI-P-2018617

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