4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Electron beam imaging

Lynn Forester

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Electron-beam processed films for microelectronics structures

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Reexamination Certificate

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Integration of low-k polymers into interlevel dielectrics using

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
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Layered hard mask and dielectric materials and methods therefor

Coating processes – With post-treatment of coating or coating material – Heating or drying
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Method of fabricating heterojunction devices integrated with...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having junction gate
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Method of fabricating heterojunction photodiodes integrated...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1393336

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