4. Semiconductor device manufacturing: process
  5. Gettering of substrate
  6. By vapor phase surface reaction

Ling-Wu Yang

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Interconnection process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of improving intrinsic gettering ability of wafer

Semiconductor device manufacturing: process – Gettering of substrate – By vapor phase surface reaction
Reexamination Certificate

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Methods of forming nitride read only memory and word lines...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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