4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. By reaction with substrate

Lidija Sekaric

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Gate patterning of nano-channel devices

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Heat pumped parametric MEMS device

Measuring and testing – Vibration – Resonance – frequency – or amplitude study
Reexamination Certificate

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High resolution silicon-containing resist

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Mechanically resonant nanostructures

Optics: measuring and testing – By light interference – Having partially reflecting plates in series
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Method for using negative tone silicon-containing resist for...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2177030

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