Measuring and testing – Vibration – Resonance – frequency – or amplitude study
Reexamination Certificate
2002-03-12
2010-02-02
Surin, J M Saint (Department: 2856)
Measuring and testing
Vibration
Resonance, frequency, or amplitude study
C073S504180, C073S655000
Reexamination Certificate
active
07654140
ABSTRACT:
A micro-electrical mechanical oscillator has a resonant frequency of oscillation that is varied by application of heat. The resonant frequency is varied at a frequency different from the resonant frequency of the oscillator to amplify oscillations. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated by a laser to provide a time varying shift of the resonant frequency (or equivalently the stiffness) of the disc. Feedback from movement of the disc is used to modulate the intensity of the laser, and thus the stiffness of the disc to provide parametric amplification of sensed vibrations, using heating as a pump. Various other shapes of micro-electrical mechanical oscillators are used in other embodiment, including an array of such oscillators on a substrate, each having different resonant frequencies.
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Craighead Harold G.
Czaplewski David Alan
Ilic Bojan
Olkhovets Anatoli
Parpia Jeevak M.
Cornell Research Foundation Inc.
M Saint Surin J
Schwegman Lundberg & Woessner, P.A.
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