4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. With measuring, testing, or inspecting

Li Te Hsu

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Critical dimension control in a semiconductor fabrication...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Method and system for improving wet chemical bath process...

Etching a substrate: processes – Nongaseous phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Plasma treatment method to reduce silicon erosion over HDI...

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
Reexamination Certificate

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