4. Image analysis
  5. Applications
  6. Manufacturing or product inspection

Li-Kong Turn

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Damascene method employing multi-layer etch stop layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Frame layout to monitor overlay performance of chip composed...

Image analysis – Applications – Manufacturing or product inspection
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Mark focusing system for steppers

Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
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Method of wafer height mapping

Optics: measuring and testing – Shape or surface configuration
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Method to predict and identify defocus wafers

Photocopying – Projection printing and copying cameras – Focus or magnification control
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Profile ID: LFUS-PAI-P-2116504

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