Lewis A. Bunz

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Passivation of InP by plasma deposited phosphorus

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
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Sputtered semiconducting films of catenated phosphorus material

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Sputtering method for making thin film field effect transistor u

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Thin film field effect transistors utilizing a polypnictide semi

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Profile ID: LFUS-PAI-P-141072

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