4. X-ray or gamma ray systems or devices
  5. Specific application
  6. Lithography

Lepton Inc.

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Lithographic electron-beam exposure apparatus and methods

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Method for fabricating X-ray masks

Fishing – trapping – and vermin destroying
Patent

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X-ray masks, their fabrication and use

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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