4. Photocopying
  5. Projection printing and copying cameras
  6. Step and repeat

Leica Microsystems Semiconductor GmbH

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Apparatus and method for reducing the electron-beam-induced...

Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate

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Apparatus for measuring feature widths on masks for the...

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Apparatus for measuring feature widths on masks for the...

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Apparatus for wafer inspection

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Autofocus module and method for a microscope-based system

Optical: systems and elements – Compound lens system – Microscope
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