4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Lawrence R. Stark

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Modular wafer transport and processing system

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Sputter module for modular wafer processing system

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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UV curemeter and method

Radiant energy – Invisible radiant energy responsive electric signalling – Ultraviolet light responsive means
Patent

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Wafer arm handler mechanism

Material or article handling – Horizontally swinging load support – Swinging about pivot
Patent

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Profile ID: LFUS-PAI-P-837632

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