Modular wafer transport and processing system

Details Modular wafer transport and processing system Modular wafer transport and processing system

1989-05-26

1990-04-17

Bucci, David A.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

1984682, 198394, 414222, 414751, 901 21, B65G 106

Patent

active

049175564

ABSTRACT:
A modular wafer processing machine is provided which is based on interconnected handling units having wafer handling arms. Each unit can pass a wafer to another unit in the same vacuum environment to a processing module.

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"Semiconductor Materials & Processes", p. 8, undated, submitted by applicant.

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