Wafer arm handler mechanism

Details Wafer arm handler mechanism Wafer arm handler mechanism

1990-10-11

1992-03-17

Bucci, David A.

Material or article handling

Horizontally swinging load support

Swinging about pivot

414217, 4147446, B65G 3500

Patent

active

050963643

ABSTRACT:
A wafer handler arm conveys a wafer from a horizontal orientation to a vertical orientation for wafer processing. The arm includes a wafer holding member which is rigidly attached to a first shaft. The first shaft is rotatable about its longitudinal axis and the first shaft is rotatable about a second axis perpendicular to the first axis.

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