4. Measuring and testing
  5. Surface and cutting edge testing

Lawrence E. Felton

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Fabricating complex micro-electromechanical systems using a...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Assembly of plural semiconductive substrates each possessing...
Reexamination Certificate

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Fabricating integrated micro-electromechanical systems using...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
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Fiber-attached optical devices with in-plane micromachined...

Optical waveguides – With optical coupler – Switch
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MEMS capping method and apparatus

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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MEMS device with conductive path through substrate

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – Insulating material
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Profile ID: LFUS-PAI-P-2371657

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