4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Having liquid and vapor etching steps

Larry Hillyer

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High aspect ratio contact surfaces having reduced contaminants

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Method and material for removing etch residue from high...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of removing etch residues

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
Reexamination Certificate

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Method of removing etch residues

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2587732

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