Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate
2005-06-28
2005-06-28
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Dimension
Thickness
C356S369000, C250S559270
Reexamination Certificate
active
06912056
ABSTRACT:
In an apparatus and a method of measuring a thickness of a multilayer on a substrate, a spectrum of reflected light reflected from the substrate is measured. A plurality of recipe data, each corresponding to one of a plurality of hypothetical multilayers, is stored. One of the plurality of hypothetical multilayers is initially assumed to be the multilayer actually formed on the substrate. A plurality of theoretical spectra is calculated using one of the plurality of recipe data in accordance with various theoretical thicknesses of one of the plurality of hypothetical multilayers. The measured spectrum is compared with the plurality of theoretical spectra to determine a temporary thickness of the multilayer. A reliability of the temporary thickness of the multilayer is estimated. The temporary thickness is output as a thickness of the multilayer on the substrate when the reliability of the temporary thickness is within an allowable range.
REFERENCES:
patent: 5457727 (1995-10-01), Frijlink
patent: 5604581 (1997-02-01), Liu et al.
patent: 5784167 (1998-07-01), Ho
patent: 6449037 (2002-09-01), Jun et al.
patent: 6489624 (2002-12-01), Ushio et al.
patent: 6515293 (2003-02-01), Jun et al.
patent: 02170008 (1990-06-01), None
patent: 04223210 (1992-08-01), None
Hyun Pil-Sik
Jung Kyung-Ho
Kang Sun-Jin
Lee Sang-Kil
Lee & Morse P.C.
Nguyen Sang H.
Toatley , Jr. Gregory J.
LandOfFree
Apparatus and method for measuring each thickness of a... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method for measuring each thickness of a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for measuring each thickness of a... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3490865