Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-08-15
2006-08-15
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000
Reexamination Certificate
active
07091485
ABSTRACT:
A pattern is inspected by acquiring a scanning electron microscope picture of an inspection pattern, and acquiring a scanning electron microscope secondary electron signal profile of the inspection pattern. A determination is made as to whether the inspection pattern is defective by comparing the scanning electron microscope picture of the inspection pattern to a scanning electron microscope picture of a sample pattern, and by comparing the scanning electron microscope secondary electron signal profile of the inspection pattern to a scanning electron microscope secondary electron signal profile of a sample pattern.
REFERENCES:
patent: 6538249 (2003-03-01), Takane et al.
patent: 6563114 (2003-05-01), Nagahama et al.
patent: 6583413 (2003-06-01), Shinada et al.
patent: 2002-289128 (2002-10-01), None
Jung Kyung-Ho
Kang Min-Sub
Kim Kwang-Sik
Kim Sung-Joong
Lee Sang-Kil
Myers Bigel Sibley & Sajovec P.A.
Nguyen Kiet T.
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