4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Kyu-Hwan Chang

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In-situ cleaning apparatuses for wafers used in integrated circu

Cleaning and liquid contact with solids – Apparatus – Automatic controls
Patent

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Method of forming capacitors having high dielectric constant mat

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent

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Methods for cleaning wafers used in integrated circuit devices

Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Reexamination Certificate

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Showerhead for a gas supplying apparatus

Coating apparatus – Gas or vapor deposition
Patent

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Profile ID: LFUS-PAI-P-467475

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