4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Optical characteristic sensed

Kyle Patterson

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Capping layer for reducing amorphous carbon contamination of...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Method of patterning a layer using a pellicle

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Printing of design features using alternating PSM technology...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2302204

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