4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Ky-Hyun Han

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Bulb-shaped recess gate of a semiconductor device and method...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Bulb-shaped recess gate of a semiconductor device and method...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Method for fabricating semiconductor device having flask...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Method for fabricating semiconductor device having recess gate

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Method for fabricating semiconductor device including plug

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2331492

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