4. Thermal measuring and testing
  5. Temperature measurement
  6. Nonelectrical, nonmagnetic, or nonmechanical temperature...

Kwan-Woo Ryu

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Method and apparatus for detecting contaminants in...

Thermal measuring and testing – Temperature measurement – Nonelectrical – nonmagnetic – or nonmechanical temperature...
Reexamination Certificate

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Method and apparatus for measuring contamination of a...

Semiconductor device manufacturing: process – Including control responsive to sensed condition
Reexamination Certificate

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Method for monitoring a density profile of impurities

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
Reexamination Certificate

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